Fabrication of three-dimensional periodic microstructures in photoresist SU-8 by phase-controlled holographic lithography
Kondo, Toshiaki, Juodkazis, Saulius, Mizeikis, Vygantas, Matsuo, Shigeki, Misawa, HiroakiVolume:
8
Language:
english
Journal:
New Journal of Physics
DOI:
10.1088/1367-2630/8/10/250
Date:
October, 2006
File:
PDF, 1.49 MB
english, 2006