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Microstructures, mechanical properties and oxidation behavior of vacuum annealed TiZrN thin films
Tung, Hsiao-Ming, Wu, Po-Hsien, Yu, Ge-Ping, Huang, Jia-HongVolume:
115
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2015.01.029
Date:
May, 2015
File:
PDF, 1.85 MB
english, 2015