High-Temperature Heat-Treatment of c...

Japanese Journal of Applied Physics 2013 / 08 Vol. 52; Iss. 8S

High-Temperature Heat-Treatment of c -, a -, r -, and m -Plane Sapphire Substrates in Mixed Gases of H 2 and N 2

Nomura, Kazushiro, Hanagata, Shoko, Kunisaki, Atsushi, Togashi, Rie, Murakami, Hisashi, Kumagai, Yoshinao, Koukitu, Akinori
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Volume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.52.08jb10
Date:
August, 2013
File:
PDF, 1.97 MB
english, 2013
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