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A Cylindrical Micro-Ultrasonic Motor Using Micromachined Bulk Piezoelectric Vibrator with Glass Case
Kanda, Takefumi, Makino, Akira, Oomori, Yoshitaka, Suzumori, KoichiVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.45.4764
Date:
May, 2006
File:
PDF, 3.50 MB
english, 2006