‘Chip-olate’ and dry-film resists for efficient...

‘Chip-olate’ and dry-film resists for efficient fabrication, singulation and sealing of microfluidic chips

Temiz, Yuksel, Delamarche, Emmanuel
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Volume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/9/097001
Date:
September, 2014
File:
PDF, 2.35 MB
english, 2014
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