A novel capacitive accelerometer with an eight-beam-mass...

Journal of Micromechanics and Microengineering 2008 / 07 Vol. 18; Iss. 7

A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (1 0 0) silicon

Xiao, Fei, Che, Lufeng, Xiong, Bin, Wang, Yuelin, Zhou, Xiaofeng, Li, Yufang, Lin, Youling
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/7/075005
Date:
July, 2008
File:
PDF, 1.45 MB
english, 2008
Conversion to is in progress
Conversion to is failed