Simulation and experimental study of maskless convex corner...

Journal of Micromechanics and Microengineering 2014 / 11 Vol. 24; Iss. 11

Simulation and experimental study of maskless convex corner compensation in TMAH water solution

Smiljanić, Milče M, Radjenović, Branislav, Radmilović-Radjenović, Marija, Lazić, Žarko, Jović, Vesna
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Volume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/11/115003
Date:
November, 2014
File:
PDF, 3.28 MB
english, 2014
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