Singulation for imaging ring arrays of capacitive...

Journal of Micromechanics and Microengineering 2014 / 10 Vol. 24; Iss. 10

Singulation for imaging ring arrays of capacitive micromachined ultrasonic transducers

Chang, Chienliu, Moini, Azadeh, Nikoozadeh, Amin, Sarioglu, Ali Fatih, Apte, Nikhil, Zhuang, Xuefeng, Khuri-Yakub, Butrus T
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Volume:
24
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/10/107002
Date:
October, 2014
File:
PDF, 933 KB
2014
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