Room-temperature gettering of Au in Si wafers with surface...

Journal of Physics D Applied Physics 2015 / 03 Vol. 48; Iss. 10

Room-temperature gettering of Au in Si wafers with surface defects under small dose γ -ray radiation

Zhang, Yu, Qin, Laixiang, Hou, Ruixiang, Ma, Nongnong, He, Youqin, Chen, Xiao, Yao, Li, Xu, Wanjing, Qin, Guogang
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Volume:
48
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/48/10/105101
Date:
March, 2015
File:
PDF, 687 KB
english, 2015
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