Microprocessing of ITO and a-Si thin films using ns laser...

Journal of Micromechanics and Microengineering 2005 / 06 Vol. 15; Iss. 6

Microprocessing of ITO and a-Si thin films using ns laser sources

Molpeceres, C, Lauzurica, S, Ocaña, J L, Gandía, J J, Urbina, L, Cárabe, J
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Volume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/6/019
Date:
June, 2005
File:
PDF, 1.28 MB
english, 2005
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