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Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library
Villarrubia, J.S., Vladár, A.E., Ming, B., Kline, R.J., Sunday, D.F., Chawla, J.S., List, S.Volume:
154
Language:
english
Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2015.01.004
Date:
July, 2015
File:
PDF, 5.60 MB
english, 2015