Scanning electron microscope measurement of width and shape...

Ultramicroscopy 2015 / 07 Vol. 154

Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library

Villarrubia, J.S., Vladár, A.E., Ming, B., Kline, R.J., Sunday, D.F., Chawla, J.S., List, S.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
154
Language:
english
Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2015.01.004
Date:
July, 2015
File:
PDF, 5.60 MB
english, 2015
Conversion to is in progress
Conversion to is failed