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Nested potassium hydroxide etching and protective coatings for silicon-based microreactors
de Mas, Nuria, Schmidt, Martin A, Jensen, Klavs FVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035011
Date:
March, 2014
File:
PDF, 3.50 MB
english, 2014