Characteristics of dual-frequency capacitively coupled SF...

Chinese Physics B 2014 / 06 Vol. 23; Iss. 6

Characteristics of dual-frequency capacitively coupled SF 6 /O 2 plasma and plasma texturing of multi-crystalline silicon

Xu, Dong-Sheng, Zou, Shuai, Xin, Yu, Su, Xiao-Dong, Wang, Xu-Sheng
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Volume:
23
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/23/6/065201
Date:
June, 2014
File:
PDF, 429 KB
english, 2014
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