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Development of a MEMS repulsive actuator for large out-of-plane force
Khan, Imran, Ben Mrad, RidhaVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035022
Date:
March, 2014
File:
PDF, 2.14 MB
english, 2014