Comparison on Nanometrology: Nano 2—Step height

Metrologia 2003 / 01 Vol. 40; Iss. 1A

Comparison on Nanometrology: Nano 2—Step height

Koenders, L, Bergmans, R, Garnaes, J, Haycocks, J, Korolev, N, Kurosawa, T, Meli, F, Park, B C, Peng, G S, Picotto, G B, Prieto, E, Gao, S, Smereczynska, B, Vorburger, T, Wilkening, G
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Volume:
40
Language:
english
Journal:
Metrologia
DOI:
10.1088/0026-1394/40/1a/04001
Date:
January, 2003
File:
PDF, 1.64 MB
english, 2003
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