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Spatially resolved Langmuir probe diagnostics in a capacitively coupled radio frequency argon and oxygen plasma
Küllig, C, Wegner, Th, Meichsner, JVolume:
24
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/24/1/015027
Date:
February, 2015
File:
PDF, 803 KB
english, 2015