On the quality of quality-factor in gap-closing...

On the quality of quality-factor in gap-closing electrostatic resonators

Shmulevich, Shai, Lerman, Michael, Elata, David
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/11/115010
Date:
November, 2013
File:
PDF, 138 KB
english, 2013
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