On substrate dopant engineering for ET-SOI MOSFETs with...

Journal of Semiconductors 2014 / 11 Vol. 35; Iss. 11

On substrate dopant engineering for ET-SOI MOSFETs with UT-BOX

Wu, Hao, Xu, Miao, Wan, Guangxing, Zhu, Huilong, Zhao, Lichuan, Tong, Xiaodong, Zhao, Chao, Chen, Dapeng, Ye, Tianchun
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Volume:
35
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/35/11/114006
Date:
November, 2014
File:
PDF, 3.50 MB
english, 2014
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