Heating mechanism in direct current superposed...

Plasma Sources Science and Technology 2013 / 04 Vol. 22; Iss. 2

Heating mechanism in direct current superposed single-frequency and dual-frequency capacitively coupled plasmas

Zhang, Quan-Zhi, Liu, Yong-Xin, Jiang, Wei, Bogaerts, Annemie, Wang, You-Nian
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Volume:
22
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/22/2/025014
Date:
April, 2013
File:
PDF, 5.49 MB
english, 2013
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