Atomic-order thermal nitridation of group IV semiconductors...

Advances in Natural Sciences: Nanoscience and Nanotechnology 2014 / 12 Vol. 6; Iss. 1

Atomic-order thermal nitridation of group IV semiconductors for ultra-large-scale integration

Murota, Junichi, Thanh, Vinh Le
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Volume:
6
Language:
english
Journal:
Advances in Natural Sciences: Nanoscience and Nanotechnology
DOI:
10.1088/2043-6262/6/1/015001
Date:
December, 2014
File:
PDF, 3.50 MB
english, 2014
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