Kinetic process of nitridation on the α-sapphire surface

Kinetic process of nitridation on the α-sapphire surface

Tang, Xingzhou, Li, Shuping, Kang, Junyong, Chen, Jiaqi
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Volume:
35
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/35/11/116004
Date:
November, 2014
File:
PDF, 1.97 MB
english, 2014
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