Temperature-dependent material properties of Z-shaped MEMS...

Journal of Micromechanics and Microengineering 2013 / 12 Vol. 23; Iss. 12

Temperature-dependent material properties of Z-shaped MEMS thermal actuators made of single crystalline silicon

Ouyang, Jing, McDonald, Margaret, Zhu, Yong
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Volume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/12/125036
Date:
December, 2013
File:
PDF, 1.61 MB
english, 2013
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