![](/img/cover-not-exists.png)
Characterization on the fatigue performance of a piezoelectric microvalve with a microfabricated silicon valve seat
Lv, Jianlu, Jiang, Yonggang, Zhang, Deyuan, Zhao, Yiju, Sun, XiujuanVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/1/015013
Date:
January, 2013
File:
PDF, 577 KB
english, 2013