Influences of nitrogen flow rate on the structures and...

Influences of nitrogen flow rate on the structures and properties of Ti and N co-doped diamond-like carbon films deposited by arc ion plating

Zhang, Lin, Ma, Guo-Jia, Lin, Guo-Qiang, Ma, He, Han, Ke-Chang
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Volume:
23
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/23/4/048102
Date:
April, 2014
File:
PDF, 1.29 MB
english, 2014
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