Substrate-Polarity Dependence of AlN Single-Crystal Films...

Japanese Journal of Applied Physics 2003 / 5 Vol. 42; Iss. Part 1, No

Substrate-Polarity Dependence of AlN Single-Crystal Films Grown on 6H–SiC(0001) and (000\bar1) by Molecular Beam Epitaxy

Harada, Masashi, Ishikawa, Yukari, Saito, Tomohiro, Shibata, Noriyoshi
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.2829
Date:
May, 2003
File:
PDF, 372 KB
english, 2003
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