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High-lateral-resolution scanning deflectometric profiler using a commercially available autocollimator
Bitou, Youichi, Kondo, YohanVolume:
25
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/25/9/095202
Date:
September, 2014
File:
PDF, 1.97 MB
english, 2014