Structural and electrical characterization of annealed Si 1− x C x /SiC thin film prepared by magnetron sputtering
Huang, Shi-Hua, Liu, JianVolume:
23
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/23/5/058105
Date:
May, 2014
File:
PDF, 3.50 MB
english, 2014