A transmission line-type electrical model for tapered TSV...

Journal of Semiconductors 2015 / 02 Vol. 36; Iss. 2

A transmission line-type electrical model for tapered TSV considering MOS effect and frequency-dependent behavior

Liu, Song, Shan, Guangbao, Xie, Chengmin, Du, Xinrong
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Volume:
36
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/36/2/024009
Date:
February, 2015
File:
PDF, 1.29 MB
english, 2015
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