A simple method for measuring the thermal diffusivity of...

Journal of Micromechanics and Microengineering 2006 / 05 Vol. 16; Iss. 5

A simple method for measuring the thermal diffusivity of surface-micromachined polysilicon thin films

Huang, Qing-An, Xu, Gaobin, Qi, Lina, Li, Weihua
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Volume:
16
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/16/5/015
Date:
May, 2006
File:
PDF, 246 KB
english, 2006
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