Silicon nanowire-based ring-shaped tri-axial force sensor...

Silicon nanowire-based ring-shaped tri-axial force sensor for smart integration on guidewire

Han, Beibei, Yoon, Yong-Jin, Hamidullah, Muhammad, Lin, Angel Tsu-Hui, Park, Woo-Tae
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Volume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/6/065002
Date:
June, 2014
File:
PDF, 3.50 MB
english, 2014
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