Calibration of the straightness and orthogonality error of...

Measurement Science and Technology 2014 / 12 Vol. 25; Iss. 12

Calibration of the straightness and orthogonality error of a laser feedback high-precision stage using self-calibration methods

Kim, Dongmin, Kim, Kihyun, Park, Sang Hyun, Jang, Sangdon
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Volume:
25
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/25/12/125007
Date:
December, 2014
File:
PDF, 3.50 MB
english, 2014
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