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Doped polycrystalline 3C–SiC films with low stress for MEMS: part I. Deposition conditions and film properties
Fu, Xiao-An, Trevino, Jacob, Mehregany, Mehran, Zorman, Christian AVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035013
Date:
March, 2014
File:
PDF, 592 KB
english, 2014