Fabrication of micro/nanotubes by mask-based diffraction lithography
Tan, Xianhua, Shi, Tielin, Gao, Yang, Sheng, Wenjun, Sun, Bo, Liao, GuanglanVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/5/055006
Date:
May, 2014
File:
PDF, 1.29 MB
english, 2014