Force measurements of a magnetic micro actuator proposed...

Journal of Micromechanics and Microengineering 2014 / 03 Vol. 24; Iss. 3

Force measurements of a magnetic micro actuator proposed for a microvalve array

Chang, Pauline J, Chang, Frank W, Yuen, Michelle C, Otillar, Robert, Horsley, David A
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Volume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/034005
Date:
March, 2014
File:
PDF, 1.29 MB
english, 2014
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