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Prototyping of a highly performant and integrated piezoresistive force sensor for microscale applications
Komati, Bilal, Agnus, Joël, Clévy, Cédric, Lutz, PhilippeVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035018
Date:
March, 2014
File:
PDF, 3.50 MB
english, 2014