Characterization of thin-film thickness

Metrologia 2014 / 12 Vol. 51; Iss. 6

Characterization of thin-film thickness

Pourjamal, Sara, Mäntynen, Henrik, Jaanson, Priit, Rosu, Dana Maria, Hertwig, Andreas, Manoocheri, Farshid, Ikonen, Erkki
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Volume:
51
Language:
english
Journal:
Metrologia
DOI:
10.1088/0026-1394/51/6/S302
Date:
December, 2014
File:
PDF, 1014 KB
english, 2014
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