Print-to-pattern dry film photoresist lithography
Garland, Shaun P, Murphy, Terrence M, Pan, TingruiVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/5/057002
Date:
May, 2014
File:
PDF, 1.97 MB
english, 2014