Accounting for PDMS shrinkage when replicating structures
Madsen, Morten Hannibal, Feidenhans’l, Nikolaj A, Hansen, Poul-Erik, Garnæs, Jørgen, Dirscherl, KaiVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/12/127002
Date:
December, 2014
File:
PDF, 1.09 MB
english, 2014