Three-Dimensional Nanofabrication with 10-nm Resolution
Yamazaki, Kenji, Yamaguchi, Toru, Namatsu, HideoVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.L1111
Date:
July, 2004
File:
PDF, 221 KB
english, 2004