Surface Smoothing Mechanism of AlN Film by Initially...

Japanese Journal of Applied Physics 2004 / 7 Vol. 43; Iss. No. 8B

Surface Smoothing Mechanism of AlN Film by Initially Alternating Supply of Ammonia

Yan, Fawang, Tsukihara, Masashi, Nakamura, Akihiro, Yadani, Takayuki, Fukumoto, Tetsuya, Naoi, Yoshiki, Sakai, Shiro
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.L1057
Date:
July, 2004
File:
PDF, 197 KB
english, 2004
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