Metal–Semiconductor–Metal AlN Mid-Ultraviolet...

Japanese Journal of Applied Physics 2004 / 6 Vol. 43; Iss. 6A

Metal–Semiconductor–Metal AlN Mid-Ultraviolet Photodetectors Grown by Magnetron Reactive Sputtering Deposition

Chen, Lung-Chien, Fu, Ming-Song, Huang, In-Lin
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.3353
Date:
June, 2004
File:
PDF, 152 KB
english, 2004
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