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Metal–Semiconductor–Metal AlN Mid-Ultraviolet Photodetectors Grown by Magnetron Reactive Sputtering Deposition
Chen, Lung-Chien, Fu, Ming-Song, Huang, In-LinVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.3353
Date:
June, 2004
File:
PDF, 152 KB
english, 2004