Cracking-assisted photolithography for mixed-scale patterning and nanofluidic applications
Kim, Minseok, Ha, Dogyeong, Kim, TaesungVolume:
6
Language:
english
Journal:
Nature Communications
DOI:
10.1038/ncomms7247
Date:
February, 2015
File:
PDF, 1.56 MB
english, 2015