Impact of CF 4 plasma treatment...

Applied Physics Express 2014 / 03 Vol. 7; Iss. 3

Impact of CF 4 plasma treatment on threshold voltage and mobility in Al 2 O 3 /InAlN/GaN MOSHEMTs

Hu, Zongyang, Yue, Yuanzheng, Zhu, Mingda, Song, Bo, Ganguly, Satyaki, Bergman, Josh, Jena, Debdeep, Xing, Huili Grace
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Volume:
7
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/apex.7.031002
Date:
March, 2014
File:
PDF, 690 KB
english, 2014
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