Geometrical characterization of micro-holes drilled in glass by gravity-feed with spark assisted chemical engraving (SACE)
Maillard, P, Despont, B, Bleuler, H, Wüthrich, RVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/7/017
Date:
July, 2007
File:
PDF, 488 KB
english, 2007