Development of a step micro-imprint lithography tool
Lan, Hongbo, Ding, Yucheng, Liu, Hongzhong, Lu, BinghengVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/10/016
Date:
October, 2007
File:
PDF, 2.37 MB
english, 2007