![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Micro+Nano Materials, Devices, and Applications - Melbourne, Victoria, Australia (Sunday 8 December 2013)] Micro/Nano Materials, Devices, and Systems - A versatile instrumentation system for MEMS-based device optical characterization
Friend, James, Tan, H. Hoe, Rafiei, Ramin, Basedow, Robert W., Silva, K. K. M. B. Dilusha, Gurusamy, Jega T., Silva Castillo, Jorge R., Tripathi, Dhirendra K., Dell, John M., Faraone, LorenzoVolume:
8923
Year:
2013
Language:
english
DOI:
10.1117/12.2034955
File:
PDF, 1.52 MB
english, 2013