[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Plasma Activation for Low Temperature Wafer Bonding
Plach, Thomas, Dragoi, Viorel, Murauer, Franz, Hingerl, KurtVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2982910
File:
PDF, 1.07 MB
english, 2008