[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October...

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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Plasma Activation for Low Temperature Wafer Bonding

Plach, Thomas, Dragoi, Viorel, Murauer, Franz, Hingerl, Kurt
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Volume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2982910
File:
PDF, 1.07 MB
english, 2008
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