Package Optimization of the Cilium-Type MEMS Bionic Vector...

IEEE Sensors Journal 2014 / 04 Vol. 14; Iss. 4

Package Optimization of the Cilium-Type MEMS Bionic Vector Hydrophone

Linxian, Liu, Wendong, Zhang, Guojun, Zhang, Chenyang, Xue
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Volume:
14
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2013.2293669
Date:
April, 2014
File:
PDF, 1.57 MB
english, 2014
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