Boron ion beam generation using a self-sputtering planar...

Review of Scientific Instruments 2014 / 02 Vol. 85; Iss. 2

Boron ion beam generation using a self-sputtering planar magnetrona)

Vizir, Aleksey, Nikolaev, Aleksey, Oks, Efim, Savkin, Konstantin, Shandrikov, Maxim, Yushkov, Georgy
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Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4824643
Date:
February, 2014
File:
PDF, 648 KB
english, 2014
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