SPIE Proceedings [SPIE 4th International Conference on Thin Film Physics and Applications - Shanghai, China (Monday 8 May 2000)] Fourth International Conference on Thin Film Physics and Applications - Properties of gallium phosphide films prepared by rf magnetron sputtering
Song, Jianquan, Liu, Zhengtang, Guo, Dagang, Yu, Zhongqi, Geng, Dongsheng, Zheng, Xiulin, Chu, Junhao, Liu, Pulin, Chang, YongVolume:
4086
Year:
2000
Language:
english
DOI:
10.1117/12.408399
File:
PDF, 172 KB
english, 2000